新型传感材料与器件研究进展
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摘要
新型传感技术融合了材料科学、微纳电子技术、生物技术等学科,是人工智能、精准医疗、新能源等战略前沿的先导和基础,也是智慧城市、智慧医疗等物联网应用的技术关键。智能化、微型化、多功能化、低功耗、低成本、高灵敏度、高可靠性是新型传感器件的发展趋势和主要研究方向。新型传感器件的传感性能很大程度上取决于传感材料的化学成分、表面修饰、传感层微观结构和完整性等因素。近年来,新型传感材料与器件的研究方兴未艾,为现代传感技术的深入开发与应用带来了新的机遇。本文综述了新型传感材料,包括硅纳米线、石墨烯、碳纳米管、二维材料、金属有机框架材料、水凝胶材料以及有机半导体材料等在力学传感、声学传感、生物传感、爆炸物监测等方面的应用。讨论了微机电系统(MEMS)和纳机电系统(NEMS)传感器技术,以及柔性可穿戴传感器相关材料、器件结构和制造方法的最新进展。
New sensing technology, which combines materials science, micro-nano-electronics and biotechnology, is regarded as the foundation and strategic frontier of the artificial intelligence, precision medical treatment and new energy technologies. It is also key technique for Internet of Things(IoT) applications including smart cities, smart health care systems. As new sensing technology develops towards intelligent, miniaturized, high sensitive and multi-functional stage, the major scientific research focuses on reducing micro power consumption and cost, increasing high reliability and performance. Previous study indicated that the sensor performance was largely influenced by the chemical composition, surface modification and microstructural morphology of the sensing material. In recent years, new materials and new devices were in the ascendant and had brought new opportunities to the in-depth development and application of modern sensor technology. In this paper, the current research and development of sensing materials including silicon nanowires, graphene, carbon nanotubes, two-dimensional materials, metal organic framework materials, water gel materials and organic semiconductors were summarized. The device applications of these materials to mechanics, acoustic sensor, biological sensing, explosives monitoring were comprehensively reviewed. Finally, the latest research progress in wearable sensoring and the development strategy of micro-electro-mechanical(MEMS) and nano-electro-mechanical system(NEMS) sensors were prospected.
New sensing technology, which combines materials science, micro-nano-electronics and biotechnology, is regarded as the foundation and strategic frontier of the artificial intelligence, precision medical treatment and new energy technologies. It is also key technique for Internet of Things(IoT) applications including smart cities, smart health care systems. As new sensing technology develops towards intelligent, miniaturized, high sensitive and multi-functional stage, the major scientific research focuses on reducing micro power consumption and cost, increasing high reliability and performance. Previous study indicated that the sensor performance was largely influenced by the chemical composition, surface modification and microstructural morphology of the sensing material. In recent years, new materials and new devices were in the ascendant and had brought new opportunities to the in-depth development and application of modern sensor technology. In this paper, the current research and development of sensing materials including silicon nanowires, graphene, carbon nanotubes, two-dimensional materials, metal organic framework materials, water gel materials and organic semiconductors were summarized. The device applications of these materials to mechanics, acoustic sensor, biological sensing, explosives monitoring were comprehensively reviewed. Finally, the latest research progress in wearable sensoring and the development strategy of micro-electro-mechanical(MEMS) and nano-electro-mechanical system(NEMS) sensors were prospected.
引文
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