基于Gsolver的双层纳米光栅位移检测装置设计与衍射特性研究
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摘要
针对现有光栅位移传感器分辨率和精度难以提高的难题,该文设计了双层纳米光栅位移检测装置。该文首先用严格耦合波理论分析了纳米光栅的衍射效率与结构参数的关系公式,然后通过Gsolver软件仿真得到双层纳米光栅的位移量与光强衍射效率的关系曲线。从关系曲线中发现:双层纳米光栅结构的0级透射光和反射光的衍射效率随可动纳米光栅结构的位移移动量周期性变化,衍射效率变化率为0.175%/nm。该文设计的双层纳米光栅位移检测装置的分辨率为800 nm,为高精度高分辨率的位移传感器提供了可行途径。
In order to solve the problem that the resolution and precision of the grating displacement sensor are difficult to be improved,a double layer nano-gratings displacement detecting device was designed in this paper.Firstly,the relationship formula between diffraction efficiency and structural parameters were obtained by the rigorous coupled-wave analysis.Then,the relationship between the displacement of the double layer nano-gratings and the efficiency of the light intensity diffraction was simulated by Gsolver software.In the results of the relation curves,it was found that the diffraction efficiency of 0-order transmitted light and reflected light of the double layer gratings structure were periodically changed with the displacement of the movable grating structure,the change rates of the diffraction efficiency is 0.175%/nm.The resolution of the double layer nano-gratings displacement detector designed in this paper is 800 nm,which provides a feasible way for the high-precision and high-resolution displacement sensor.
In order to solve the problem that the resolution and precision of the grating displacement sensor are difficult to be improved,a double layer nano-gratings displacement detecting device was designed in this paper.Firstly,the relationship formula between diffraction efficiency and structural parameters were obtained by the rigorous coupled-wave analysis.Then,the relationship between the displacement of the double layer nano-gratings and the efficiency of the light intensity diffraction was simulated by Gsolver software.In the results of the relation curves,it was found that the diffraction efficiency of 0-order transmitted light and reflected light of the double layer gratings structure were periodically changed with the displacement of the movable grating structure,the change rates of the diffraction efficiency is 0.175%/nm.The resolution of the double layer nano-gratings displacement detector designed in this paper is 800 nm,which provides a feasible way for the high-precision and high-resolution displacement sensor.
引文
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[12] 唐元开,王正岭,刘清雅.亚波长光栅的模态特性与衍射效率及其应用[J].电子科技,2016,29(3):118-121.
[2] 魏培培.基于双光栅干涉的三维位移测量技术研究[D].哈尔滨:哈尔滨工业大学,2015.
[3] MOHARAM M G,GAYLORD T K,GRANN E B,et al.Formulation for stable and efficient implementation of the rigorous coupled-wave analysis of binary gratings[J].JOSA A,1995,12(5):1068-1076.
[4] LI X,GAO W,MUTO H,et al.A six-degree-of-freedom surface encoder for precision positioning of a planar motion stage[J].Precision Engineering,2013,37(3):771-781.
[5] 海德汉(HEIDENHAIN)新产品和应用介绍[J].航空制造技术,2014(4):106-107.
[6] MOHARAM M G,GAYLORD T K.Diffraction analysis of dielectric surface-relief gratings[J].JOSA,1982,72(10):1385-1392.
[7] MOHARAM M G,GAYLORD T K,POMMET D A,et al.Stable implementation of the rigorous coupled-wave analysis for surface-relief gratings:enhanced transmittance matrix approach[J].JOSA A,1995,12(5):1077-1086.
[8] CARR D W,SULLIVAN J P,FRIEDMANN T A.Laterally deformable nanomechanicalzeroth-order gratings:anomalous diffraction studied by rigorous coupled-wave analysis[J].Optics letters,2003,28(18):1636-1638.
[9] 尤勐,黄战华,蔡怀宇.基于严格耦合波理论的新型耦合光栅分析[J].天津大学学报:自然科学与工程技术版,2014,47(3):262-266.
[10] 杨亮,李艳秋,马旭,等.嵌入式光栅多层结构锥形衍射的严格耦合波理论研究[J].红外与激光工程,2014,43(6):1899-1904.
[11] 赵华君.模态法设计光栅型相位延迟器研究[J].激光杂志,2015(8):101-104.
[12] 唐元开,王正岭,刘清雅.亚波长光栅的模态特性与衍射效率及其应用[J].电子科技,2016,29(3):118-121.