洁净室起重机检验方案与现场检验实施
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摘要
随着微电子行业的蓬勃发展,越来越多的洁净室起重机投入使用,该类设备的检验需求量也越来越大。总结了洁净室的主要标准和对空气洁净度的基本要求,归纳了洁净室起重机相对于常规起重机在配置方面的特点。结合检验实践,讨论了TFT-LCD厂房洁净室起重机定期检验方案的制定,指出了该类设备现场检验时的注意事项,有利于更好地完成该类设备的检验工作,对安装于类似洁净室的起重设备的检验和维保工作有参考价值。
With the booming development of microelectronics industry, more and more clean room cranes are put into use,and the inspection demand for such equipment is increasing too. This paper summarizes the main standards of clean room and the basic requirements for air cleanliness, and summarizes the characteristics of the con?guration of clean room cranes relative to conventional cranes. Combined with the inspection practice, the formulation of the regular inspection scheme for the crane in the clean room of TFT-LCD workshop was discussed, and the matters needing attention in the on-site inspection of this kind of equipment were pointed out, which is conducive to better completing the inspection of this kind of equipment and has reference value for the inspection and maintenance of lifting equipment installed in similar clean rooms.
With the booming development of microelectronics industry, more and more clean room cranes are put into use,and the inspection demand for such equipment is increasing too. This paper summarizes the main standards of clean room and the basic requirements for air cleanliness, and summarizes the characteristics of the con?guration of clean room cranes relative to conventional cranes. Combined with the inspection practice, the formulation of the regular inspection scheme for the crane in the clean room of TFT-LCD workshop was discussed, and the matters needing attention in the on-site inspection of this kind of equipment were pointed out, which is conducive to better completing the inspection of this kind of equipment and has reference value for the inspection and maintenance of lifting equipment installed in similar clean rooms.
引文
[1]严情木,赵全起.洁净起重机[J].起重运输机械,2012(4):16-18.
[2]金红萍,袁秀峰,兰江松.洁净室电动葫芦桥式起重机[J].2015(8):21,22.
[3]GB 50073-013洁净厂房设计规范[S].
[4]GB 50472-2008电子工业洁净厂房设计规范[S].
[5]GB/T 25915.1-2010洁净室及相关受控环境第1部分:空气洁净度等级[S].
[6]TSG Q7015-2016起重机械定期检验规则[S].
[7]罗洪国,石荣桂.浅析洁净室洁净度的污染源及其控制方法[J].洁净与空调技术,2011(2):79.
[2]金红萍,袁秀峰,兰江松.洁净室电动葫芦桥式起重机[J].2015(8):21,22.
[3]GB 50073-013洁净厂房设计规范[S].
[4]GB 50472-2008电子工业洁净厂房设计规范[S].
[5]GB/T 25915.1-2010洁净室及相关受控环境第1部分:空气洁净度等级[S].
[6]TSG Q7015-2016起重机械定期检验规则[S].
[7]罗洪国,石荣桂.浅析洁净室洁净度的污染源及其控制方法[J].洁净与空调技术,2011(2):79.