三维表面粗糙度测量方法综述
|
摘要
表面粗糙度测量是评估零件表面特性的重要手段。经过二十多年的发展,三维表面粗糙度逐渐成为反映工件表面特性的重要指标。本文总结并比较了接触式测量法、非接触式测量法和纳米表面粗糙度分析法中常用三维表面粗糙度的测量原理及特点。针对每种测量方法的发展现状,本文讨论了其适用范围及局限性,并指出了未来的发展方向。
The measurement of surface roughness is a crucial tool for characterizing engineering surfaces.After more than 20 years of development,areal surface roughness has become a key factor that reflects the characteristics of engineering surfaces.This study includes summaries and comparisons of the characteristics of areal surface roughness,contact and non-contact measurement methods,and nanometer-scale surface roughness analysis methods.The applications and limitations of existing methods are also analyzed,and the direction for future development is presented.
The measurement of surface roughness is a crucial tool for characterizing engineering surfaces.After more than 20 years of development,areal surface roughness has become a key factor that reflects the characteristics of engineering surfaces.This study includes summaries and comparisons of the characteristics of areal surface roughness,contact and non-contact measurement methods,and nanometer-scale surface roughness analysis methods.The applications and limitations of existing methods are also analyzed,and the direction for future development is presented.
引文
[1]WHITEHOUSE D J.Surface metrology[J].Measurement Science and Technology,1997,8(9):955-972.
[2]刘斌,冯其波,匡萃方.表面粗糙度测量方法综述[J].光学仪器,2004,26(5):54-58.LIU B,FENG Q B,KUANG C F.Survey of measurement methods for surf ace roughness[J].Optical Instruments,2004,26(5):54-58.(in Chinese)
[3]蒋向前,Blunt L.三维表面测量的发展[J].工程设计,2000,7(4):98-100.JIANG X Q,BLUNT L.Advance in the three-dimensional surface metrology[J].Engineering Design,2000,7(4):98-100.(in Chinese)
[4] ISO 25178-2(2010).Geometrical product specifications(GPS)-Surface texture:Areal-Part 2:Terms,definitions and surface texture parameters.International Organization of Standardization[S].
[5] DE GRIEVE D J,KALISZER H,ROWE G W.A normal wear process examined by measurements of surface topography[J].Ann.CIRP,1970,18(4):585-592.
[6] CHIFFRE L D,NIELSEN H S.A digital system for surface roughness analysis of plane and cylindrical parts[J].Precision engineering,1987,9(2):59-64.
[7] SHERRINGTON I,SMITH E H.Modern measurement techniques in surface metrology:part II;optical instruments[J].Wear,1988,125(3):289-308.
[8] DONG W P,SULLIVAN P J,STOUT K J.Comprehensive study of parameters for characterizing three-dimensional surface topography II:Statistical properties of parameter variation[J].Wear,1993,167(1):9-21.
[9] LEARCH R,GIUSCA C,HENNING A,et al..ISO Definition of Resolution for Surface Topography Measuring Instruments[M]//OSTEN W.Berlin:Springer,2014:405-410.
[10] NGUYEN A T,LEE BUTLER D.Correlation of grinding wheel topography and grinding performance:A study from a viewpoint of three-dimensional surface characterization[J].Journal of Materials Processing Technology,2008,208(1-3):14-23.
[11] ISO.ISO 25178-6:2010.Geometrical product specifications(GPS)-Surface texture:ArealPart 6:Classification of methods for measuring surface texture.International Organization of Standardization[S].Geneva:International Organization for Standardization,2010.
[12]中华人民共和国国家质量监督检验检疫总局,中国国家标准化管理委员会.GB/T 33523.6-2017产品几何技术规范(GPS)表面结构区域法第6部分:表面结构测量方法的分类[S].北京:中国标准出版社,2017.General Administration of Quality Supervision,Inspection and Quarantine of the People's Republic of China.Standardization Administration of China.GB/T33523.6-2017 Geometrical Product Specifications(GPS)-surface texture:areal-part 6:Classification of methods for measuring surface texture[S].Beijing:Standards Press of China,2017.(in Chinese)
[13]李伯奎.触针式三维粗糙度测量仪的开发及应用[J].润滑与密封,2006(4):140-142.LI B K.Development and application of the roughness measuring instrument of stylus and three-dimensional[J].Lubrication Engineering,2006(4):140-142.(in Chinese)
[14]李成贵,董申.3D表面粗糙度的测量方法分析[J].航空精密制造技术,1999,32(2):36-40.LI CH G,DONG SH.Length calculation method of welded rod blanks roughness[J].Aviation Precision Manufacturing Technology,1999,32(2):36-40.(in Chinese)
[15] ABBOTT E J,FIRESTONE F A.Apparatus for determining roughness of surfaces:U.S.Patent2,048,154[P].1936-7-21.
[16]唐文彦,张军,李慧鹏.触针法测量表面粗糙度的发展及现状[C]//中国机械工程学会先进制造技术与齿轮学术会议,2000.TANG W Y,ZHANG J,LI H P.The development and current situation of surface roughness measured by contact method[C]//The Academic conference of Advanced Manufacturing Technology and gear of China Mechanical Engineering Society,2000.(in Chinese)
[17] WHITEHOUSE D J.Comparison between stylus and optical methods for measuring surfaces[J].CIRP Annals,1988,37(2):649-653.
[18] STEDMAN M,LINDSEY K.Limits of surface measurement by stylus instruments[J].SPIE,1989,1009:56-62.
[19]杨杰,卢静,王俊,等.触针式三维粗糙度仪的设计[J].机械设计与制造,2013(5):29-31.YANG J,LU J,WANG J,et al..The design of three-dimensional roughmeter[J].Machinery Design&Manufacture,2013(5):29-31.(in Chinese)
[20]张也晗,崔彤,张扬,等.表面粗糙度三维测量和评定的研究[J].计量与测试技术,2012,39(11):31-32,34.ZHANG Y H,CUI T,ZHANG Y,et al..Research of surface roughness three-dimensional measurement and evaluation[J].Metrology&Measurement Technique,2012,39(11):31-32,34.(in Chinese)
[21] BRUNING J H,HERRIOTT D R,GALLAGHER J E,et al..Digital wavefront measuring interferometer for testing optical surfaces and lenses[J].Applied optics,1974,13(11):2693-2703.
[22]常素萍.基于白光干涉轮廓尺寸与形貌非接触测量方法和系统[D].武汉:华中科技大学,2007.CHANG S P.The Surface Shape and Profile Dimension Measurement Method and System Based on White-light Interferometric Technology[D].Wuhan:Huazhong University of Science and Technology,2007.(in Chinese)
[23] WYANT J C,KOLIOPOULOS C L,BHUSHAN B,et al..Development of a three-dimensional noncontact digital optical profiler[J].Journal of Tribology,1986,108(1):1-8.
[24]KOLIOPOULOS C L.Interferometric Optical Phase Measurement Techniques[D].Tucson:The University of Arizona,1981.
[25] WYANT J C,KOLIOPOULOS C L,BHUSHAN B,et al..An optical profilometer for surface characterization of magnetic media[J].ASLE transactions,1984,27(2):101-113.
[26]童晓蕾,李玉和,林浩山,等.超精表面三维形貌相移干涉检测实验研究[J].电子测量与仪器学报,2009,23(12):65-69.TONG X L,LI Y H,LIN H SH,et al..Research on phase-shifting interferometry contrast three-dimensional topography of ultra precision surface[J].Journal of Electronic Measurement and lnstrument,2009,23(12):65-69.(in Chinese)
[27] KINO G S,CHIM S S C.Mirau correlation microscope[J].Applied Optics,1990,29(26):3775-3783.
[28] DRESEL T,HUSLER G,VENZKE H.Three-dimensional sensing of rough surfaces by coherence radar[J].Applied Optics,1992,31(7):919-925.
[29] HAEUSLER G,NEUMANN J.Coherence radar:an accurate 3D sensor for rough surfaces[J].SPIE,1993,1822:200-205.
[30] CABER P J.Interferometric profiler for rough surfaces[J].Applied Optics,1993,32(19):3438-3441.
[31] LEACH R K,BROWN L,JIANG X,et al..Guide to the measurement of smooth surface topography using coherence scanning interferometry[R].Measurement good Practice Guide No.108.Hampton Road,Teddington,Middlesex:National Physical Laboratory,2008:17.
[32]陈竹,姜宏振,刘旭,等.数字全息术用于光学元件表面缺陷形貌测量[J].光学精密工程,2017,25(3):576-583.CHEN ZH,JIANG H ZH,LIU X,et al..Measurement of surface defects of optical elements using digital holography[J].Opt.Precision Eng.,2017,25(3):576-583.(in Chinese)
[33] GABOR D.A new microscopic principle[J].Nature,1948,161(4098):777-778.
[34]陈刚,周文静,胡祯,等.表面粗糙度数字全息检测[J].应用光学,2014,35(6):1040-1047.CHEN G,ZHOU W J,HU ZH,et al..Surface roughness measurement based on digital holography[J].Journal of Applied Optics,2014,35(6):1040-1047.(in Chinese)
[35] COLOMB T,KHN J,DEPEURSINGE C,et al..Several micron-range measurements with sub-nanometric resolution by the use of dualwavelength digital holography and vertical scanning[J].SPIE,2009,7389:73891H.
[36]KIM M K.Digital Holographic Microscopy[M].New York:Springer,2011:209-235.
[37]MINSKY M.Confocal patent focal scanning microscope:US,3013467[P].1957.
[38] DAVIDOVITS P,EGGER M D.Scanning laser microscope for biological investigations[J].Applied optics,1971,10(7):1615-1619.
[39]WINDECKER R,FLEISCHER M,TIZIANI H J.Low-coherence fiber-optic sensor with a large numerical aperture for topographic measurements[J].Applied optics,1998,37(19):4080-4083.
[40] YANG L S,WANG G Y,WANG J G,et al..Surface profilometry with a fibre optical confocal scanning microscope[J].Measurement Science and Technology,2000,11(12):1786-1791.
[41]ARTIGAS R.Imaging confocal microscopy[M]//LEACH R.Optical Measurement of Surface Topography. Berlin, Heidelberg:Springer,2011:237-286.
[42] XIAO G Q,CORLE T R,KINO G S.Real-time confocal scanning optical microscope[J].Applied physics letters,1988,53(8):716-718.
[43] JORDAN H J,BRODMANN R,GRIGAT M,et al..Quality assurance of HARMS and MOEMS surface structures using confocal white light microscopy[J].SPIE,2001,4440:51-58.
[44] COHEN-SABBAN J,GAILLARD-GROLEAS J,CREPIN P J.Quasi-confocal extended field surface sensing[J].SPIE,2001,4449:178-183.
[45]MOLESINI G,PEDRINI G,POGGI P,et al..Focus-wavelength encoded optical profilometer[J].Optics Communications,1984,49(4):229-233.
[46] BROWNE M A,AKINYEMI O,BOYDE A.Confocal surface profiling utilizing chromatic aberration[J].Scanning,1992,14(3):145-153.
[47] MIURA K,OKADA M,TAMAKI J.Three-dimensional measurement of wheel surface topography with a laser beam probe[J].Advances in Abrasive Technology,2000,3:303-308.
[48] MITSUI K.In-process sensors for surface roughness and their applications[J].Precision Engineering,1986,8(4):212-220.
[49] MASHIMO K,KITABAYASHI S,TANIMURA Y.Optical&noncontact measuring instrument for3-D shape[J].Journal of the Japan Society for Precision Engineering,1993,59(7):1091-1096.
[50] YANG CH L,PU ZH B,ZHAO H J.Diffraction analysis and evaluation of a focus-error detection scheme for an optical profilometer[J].SPIE,2000:180-184.
[51] FUKATSU H,YANAGI K.Development of an optical stylus displacement sensor for surface profiling instruments[J].Microsystem Technologies,2005,11(8-10):582-589.
[52]MIURA K,NOSE A.Point Autofocus Instruments[M]//LEACH R.Optical Measurement of Surface Topography. Berlin Heidelberg:Springer,2011.
[53] VON HELMHOLTZ H.Mechanism of Accommodation[M]//SOUTHALL J P C.Helmholtz′s Treatise on Physiological Optics,New York:Optical Society of America,1924.
[54] DANZL R,HELMLI F,SCHERER S.Focus variation-a robust technology for high resolution optical 3D surface metrology[J].Strojniski Vestnik/Journal of Mechanical Engineering,2011,57(3):245-256.
[55]HUSLER G,HECKEL W.Light sectioning with large depth and high resolution[J].Applied Optics,1988,27(24):5165-5169.
[56]陈晓荣,蔡萍,施文康.光学非接触三维形貌测量技术新进展[J].光学精密工程,2002,10(5):528-532.CHEN X R,CAI P,SHI W K.The latest development of optical non-contact 3Dprofile measurement[J].Opt.Precision Eng.,2002,10(5):528-532.(in Chinese)
[57] SCHMALTZ G.Technische Oberflchenkunde[M].Berlin,Heidelberg:Springer,1936.
[58] ABOUELATTA O B.3Dsurface roughness measurement using a light sectioning vision system[C].Proceedings of World Congress on Engineering,International Association of Engineers,2010:698-703.
[59]金守峰,陈蓉,范荻,等.机加工表面粗糙度的光切显微成像测量方法与试验研究[J].制造业自动化,2016,38(4):15-19.JIN SH F,CHEN R,FAN D,et al..Measurement and experiment of light-section microscope images on machined surface roughness[J].Manufacturing Automation,2016,38(4):15-19.(in Chinese)
[60]崔凤奎,宋战波,王晓强,等.三维表面粗糙度激光三角法测量原理研究[J].矿山机械,2010,38(14):30-33.CUI F K,SONG ZH B,WANG X Q,et al..Study on principle of laser triangulation used for measurement of 3Dsurface roughness[J].Mining&Processing Equipment,2010,38(14):30-33.(in Chinese)
[61]卢晋人,黄元庆.激光三角法测量表面形貌[J].厦门大学学报:自然科学版,2004,43(1):50-53.LU J R,HUANG Y Q.Laser triangulation method for surface measurement[J].Journal of Xiamen University:Natural Science,2004,43(1):50-53.(in Chinese)
[62]吴剑锋,王文,陈子辰.激光三角法测量误差分析与精度提高研究[J].机电工程,2003,20(5):89-91.WU J F,WANG W,CHEN Z CH.Study on the analysis for error in triangular laser measurement and the method of improving accuracy[J].Mechanical&Electrical Engineering Magazine,2003,20(5):89-91.(in Chinese)
[63]常城,张志峰.激光三角法测量的误差研究[J].中国科技信息,2006(23):61-62,64.CHANG CH,ZHANG ZH F.Study on the error in triangular laser measurement[J].China Science and Technology Information,2006(23):61-62,64.(in Chinese)
[64] LONARDO P M,TRUMPOLD H,DE CHIFFRE L.Progress in 3Dsurface microtopography characterization[J].CIRP Annals,1996,45(2):589-598.
[65] COLOMB T,KRIVEC S,HUTTER H,et al..Digital holographic reflectometry[J].Optics Express,2010,18(4):3719-3731.
[66] MYSHKIN N K,GRIGORIEV A Y,CHIZHIKS A,et al..Surface roughness and texture analysis in microscale[J].Wear,2003,254(10):1001-1009.
[67] THIAN S C H,FENG W,WONG Y S,et al..Dimensional measurement of 3D microstruture based on white light interferometer[C]//Proceedings of the 4th International Symposium on Instrumentation and Science and Technology,Chinese Society for Measurement,CIS,2006:1435.
[68]YOUNG R D.Surface microtopography[J].Physics Today,1971,24(11):42.
[69] SUGANUMA T.Measurement of surface topography using SEM with two secondary electron detectors[J].Journal of Electron Microscopy,1985,34(4):328-337.
[70] BINNIG G,ROHRER H,GERBER C,et al..Tunneling through a controllable vacuum gap[J].Applied Physics Letters,1982,40(2):178-180.
[71]朱星.扫描近场光学显微镜[J].现代科学仪器,1996(4):7-9.ZHU X.Scanning near-field optical microscopy[J].Modern Scientific Instruments,1996(4):7-9.(in Chinese)
[72] DRIG U,POHL D W,ROHNER F.Near-field optical-scanning microscopy[J].Journal of Applied Physics,1986,59(10):3318-3327.
[73] BINNIG G,QUATE C F,GERBERr C.Atomic force microscope[J].Physical Review Letters,1986,56(9):930-933.
[74] DE OLIVEIRA R R L,ALBUQUERQUE D A C,CRUZ T G S,et al..Measurement of the nanoscale roughness by atomic force microscopy:basic principles and applications[M]//BELLITTO V.Atomic Force Microscopy-Imaging,Measuring and Manipulating Surfaces at the Atomic Scale.InTech,2012.
[75] MATHIA T G,PAWLUS P,WIECZOROWSKI M.Recent trends in surface metrology[J].Wear,2011,271(3-4):494-508.
[76]周明宝,林大键,郭履容,等.微结构表面形貌的测量[J].光学精密工程,1999,7(3):7-13.ZHOU M B,LIN D J,GUO L R,et al..Measurement of microstructures topography[J].Opt.Precision Eng.,1999,7(3):7-13.(in Chinese)
[77] HAIDAR Y,DE FORNEL F,ZEROUKI C,et al..Study of the roughness and optical near field of mass surface by using a SNOM with shear-force regulation[J].SPIE,2004,5458:171-182.
[78] NEMOTO K,YANAGI K,AKETAGAWA M,et al..Development of a roughness measurement standard with irregular surface topography for improving 3D surface texture measurement[J].Measurement Science and Technology,2009,20(8):084023.
[79] CONROY M,ARMSTRONG J.A comparison of surface metrology techniques[J].Journal of Physics:Conference Series,2005,13(3):458.
[80]李剑白,李达成,李小芸,等.原子力显微镜测试光学超光滑表面微轮廓的研究[J].光学学报,2000,20(11):1533-1537.LI J B,LI D CH,LI X Y,et al..Study on testing method for microprofile of optical supersmooth surface[J].Acta Optica Sinica,2000,20(11):1533-1537.(in Chinese)
[81] STOUT K J,SULLIVAN P J,DONG W P,et al..The Development of Methods for the Characterisation of Roughness in Three Dimensions[M].Birmingham:ECSC-EEC-EAEC,1993.
[2]刘斌,冯其波,匡萃方.表面粗糙度测量方法综述[J].光学仪器,2004,26(5):54-58.LIU B,FENG Q B,KUANG C F.Survey of measurement methods for surf ace roughness[J].Optical Instruments,2004,26(5):54-58.(in Chinese)
[3]蒋向前,Blunt L.三维表面测量的发展[J].工程设计,2000,7(4):98-100.JIANG X Q,BLUNT L.Advance in the three-dimensional surface metrology[J].Engineering Design,2000,7(4):98-100.(in Chinese)
[4] ISO 25178-2(2010).Geometrical product specifications(GPS)-Surface texture:Areal-Part 2:Terms,definitions and surface texture parameters.International Organization of Standardization[S].
[5] DE GRIEVE D J,KALISZER H,ROWE G W.A normal wear process examined by measurements of surface topography[J].Ann.CIRP,1970,18(4):585-592.
[6] CHIFFRE L D,NIELSEN H S.A digital system for surface roughness analysis of plane and cylindrical parts[J].Precision engineering,1987,9(2):59-64.
[7] SHERRINGTON I,SMITH E H.Modern measurement techniques in surface metrology:part II;optical instruments[J].Wear,1988,125(3):289-308.
[8] DONG W P,SULLIVAN P J,STOUT K J.Comprehensive study of parameters for characterizing three-dimensional surface topography II:Statistical properties of parameter variation[J].Wear,1993,167(1):9-21.
[9] LEARCH R,GIUSCA C,HENNING A,et al..ISO Definition of Resolution for Surface Topography Measuring Instruments[M]//OSTEN W.Berlin:Springer,2014:405-410.
[10] NGUYEN A T,LEE BUTLER D.Correlation of grinding wheel topography and grinding performance:A study from a viewpoint of three-dimensional surface characterization[J].Journal of Materials Processing Technology,2008,208(1-3):14-23.
[11] ISO.ISO 25178-6:2010.Geometrical product specifications(GPS)-Surface texture:ArealPart 6:Classification of methods for measuring surface texture.International Organization of Standardization[S].Geneva:International Organization for Standardization,2010.
[12]中华人民共和国国家质量监督检验检疫总局,中国国家标准化管理委员会.GB/T 33523.6-2017产品几何技术规范(GPS)表面结构区域法第6部分:表面结构测量方法的分类[S].北京:中国标准出版社,2017.General Administration of Quality Supervision,Inspection and Quarantine of the People's Republic of China.Standardization Administration of China.GB/T33523.6-2017 Geometrical Product Specifications(GPS)-surface texture:areal-part 6:Classification of methods for measuring surface texture[S].Beijing:Standards Press of China,2017.(in Chinese)
[13]李伯奎.触针式三维粗糙度测量仪的开发及应用[J].润滑与密封,2006(4):140-142.LI B K.Development and application of the roughness measuring instrument of stylus and three-dimensional[J].Lubrication Engineering,2006(4):140-142.(in Chinese)
[14]李成贵,董申.3D表面粗糙度的测量方法分析[J].航空精密制造技术,1999,32(2):36-40.LI CH G,DONG SH.Length calculation method of welded rod blanks roughness[J].Aviation Precision Manufacturing Technology,1999,32(2):36-40.(in Chinese)
[15] ABBOTT E J,FIRESTONE F A.Apparatus for determining roughness of surfaces:U.S.Patent2,048,154[P].1936-7-21.
[16]唐文彦,张军,李慧鹏.触针法测量表面粗糙度的发展及现状[C]//中国机械工程学会先进制造技术与齿轮学术会议,2000.TANG W Y,ZHANG J,LI H P.The development and current situation of surface roughness measured by contact method[C]//The Academic conference of Advanced Manufacturing Technology and gear of China Mechanical Engineering Society,2000.(in Chinese)
[17] WHITEHOUSE D J.Comparison between stylus and optical methods for measuring surfaces[J].CIRP Annals,1988,37(2):649-653.
[18] STEDMAN M,LINDSEY K.Limits of surface measurement by stylus instruments[J].SPIE,1989,1009:56-62.
[19]杨杰,卢静,王俊,等.触针式三维粗糙度仪的设计[J].机械设计与制造,2013(5):29-31.YANG J,LU J,WANG J,et al..The design of three-dimensional roughmeter[J].Machinery Design&Manufacture,2013(5):29-31.(in Chinese)
[20]张也晗,崔彤,张扬,等.表面粗糙度三维测量和评定的研究[J].计量与测试技术,2012,39(11):31-32,34.ZHANG Y H,CUI T,ZHANG Y,et al..Research of surface roughness three-dimensional measurement and evaluation[J].Metrology&Measurement Technique,2012,39(11):31-32,34.(in Chinese)
[21] BRUNING J H,HERRIOTT D R,GALLAGHER J E,et al..Digital wavefront measuring interferometer for testing optical surfaces and lenses[J].Applied optics,1974,13(11):2693-2703.
[22]常素萍.基于白光干涉轮廓尺寸与形貌非接触测量方法和系统[D].武汉:华中科技大学,2007.CHANG S P.The Surface Shape and Profile Dimension Measurement Method and System Based on White-light Interferometric Technology[D].Wuhan:Huazhong University of Science and Technology,2007.(in Chinese)
[23] WYANT J C,KOLIOPOULOS C L,BHUSHAN B,et al..Development of a three-dimensional noncontact digital optical profiler[J].Journal of Tribology,1986,108(1):1-8.
[24]KOLIOPOULOS C L.Interferometric Optical Phase Measurement Techniques[D].Tucson:The University of Arizona,1981.
[25] WYANT J C,KOLIOPOULOS C L,BHUSHAN B,et al..An optical profilometer for surface characterization of magnetic media[J].ASLE transactions,1984,27(2):101-113.
[26]童晓蕾,李玉和,林浩山,等.超精表面三维形貌相移干涉检测实验研究[J].电子测量与仪器学报,2009,23(12):65-69.TONG X L,LI Y H,LIN H SH,et al..Research on phase-shifting interferometry contrast three-dimensional topography of ultra precision surface[J].Journal of Electronic Measurement and lnstrument,2009,23(12):65-69.(in Chinese)
[27] KINO G S,CHIM S S C.Mirau correlation microscope[J].Applied Optics,1990,29(26):3775-3783.
[28] DRESEL T,HUSLER G,VENZKE H.Three-dimensional sensing of rough surfaces by coherence radar[J].Applied Optics,1992,31(7):919-925.
[29] HAEUSLER G,NEUMANN J.Coherence radar:an accurate 3D sensor for rough surfaces[J].SPIE,1993,1822:200-205.
[30] CABER P J.Interferometric profiler for rough surfaces[J].Applied Optics,1993,32(19):3438-3441.
[31] LEACH R K,BROWN L,JIANG X,et al..Guide to the measurement of smooth surface topography using coherence scanning interferometry[R].Measurement good Practice Guide No.108.Hampton Road,Teddington,Middlesex:National Physical Laboratory,2008:17.
[32]陈竹,姜宏振,刘旭,等.数字全息术用于光学元件表面缺陷形貌测量[J].光学精密工程,2017,25(3):576-583.CHEN ZH,JIANG H ZH,LIU X,et al..Measurement of surface defects of optical elements using digital holography[J].Opt.Precision Eng.,2017,25(3):576-583.(in Chinese)
[33] GABOR D.A new microscopic principle[J].Nature,1948,161(4098):777-778.
[34]陈刚,周文静,胡祯,等.表面粗糙度数字全息检测[J].应用光学,2014,35(6):1040-1047.CHEN G,ZHOU W J,HU ZH,et al..Surface roughness measurement based on digital holography[J].Journal of Applied Optics,2014,35(6):1040-1047.(in Chinese)
[35] COLOMB T,KHN J,DEPEURSINGE C,et al..Several micron-range measurements with sub-nanometric resolution by the use of dualwavelength digital holography and vertical scanning[J].SPIE,2009,7389:73891H.
[36]KIM M K.Digital Holographic Microscopy[M].New York:Springer,2011:209-235.
[37]MINSKY M.Confocal patent focal scanning microscope:US,3013467[P].1957.
[38] DAVIDOVITS P,EGGER M D.Scanning laser microscope for biological investigations[J].Applied optics,1971,10(7):1615-1619.
[39]WINDECKER R,FLEISCHER M,TIZIANI H J.Low-coherence fiber-optic sensor with a large numerical aperture for topographic measurements[J].Applied optics,1998,37(19):4080-4083.
[40] YANG L S,WANG G Y,WANG J G,et al..Surface profilometry with a fibre optical confocal scanning microscope[J].Measurement Science and Technology,2000,11(12):1786-1791.
[41]ARTIGAS R.Imaging confocal microscopy[M]//LEACH R.Optical Measurement of Surface Topography. Berlin, Heidelberg:Springer,2011:237-286.
[42] XIAO G Q,CORLE T R,KINO G S.Real-time confocal scanning optical microscope[J].Applied physics letters,1988,53(8):716-718.
[43] JORDAN H J,BRODMANN R,GRIGAT M,et al..Quality assurance of HARMS and MOEMS surface structures using confocal white light microscopy[J].SPIE,2001,4440:51-58.
[44] COHEN-SABBAN J,GAILLARD-GROLEAS J,CREPIN P J.Quasi-confocal extended field surface sensing[J].SPIE,2001,4449:178-183.
[45]MOLESINI G,PEDRINI G,POGGI P,et al..Focus-wavelength encoded optical profilometer[J].Optics Communications,1984,49(4):229-233.
[46] BROWNE M A,AKINYEMI O,BOYDE A.Confocal surface profiling utilizing chromatic aberration[J].Scanning,1992,14(3):145-153.
[47] MIURA K,OKADA M,TAMAKI J.Three-dimensional measurement of wheel surface topography with a laser beam probe[J].Advances in Abrasive Technology,2000,3:303-308.
[48] MITSUI K.In-process sensors for surface roughness and their applications[J].Precision Engineering,1986,8(4):212-220.
[49] MASHIMO K,KITABAYASHI S,TANIMURA Y.Optical&noncontact measuring instrument for3-D shape[J].Journal of the Japan Society for Precision Engineering,1993,59(7):1091-1096.
[50] YANG CH L,PU ZH B,ZHAO H J.Diffraction analysis and evaluation of a focus-error detection scheme for an optical profilometer[J].SPIE,2000:180-184.
[51] FUKATSU H,YANAGI K.Development of an optical stylus displacement sensor for surface profiling instruments[J].Microsystem Technologies,2005,11(8-10):582-589.
[52]MIURA K,NOSE A.Point Autofocus Instruments[M]//LEACH R.Optical Measurement of Surface Topography. Berlin Heidelberg:Springer,2011.
[53] VON HELMHOLTZ H.Mechanism of Accommodation[M]//SOUTHALL J P C.Helmholtz′s Treatise on Physiological Optics,New York:Optical Society of America,1924.
[54] DANZL R,HELMLI F,SCHERER S.Focus variation-a robust technology for high resolution optical 3D surface metrology[J].Strojniski Vestnik/Journal of Mechanical Engineering,2011,57(3):245-256.
[55]HUSLER G,HECKEL W.Light sectioning with large depth and high resolution[J].Applied Optics,1988,27(24):5165-5169.
[56]陈晓荣,蔡萍,施文康.光学非接触三维形貌测量技术新进展[J].光学精密工程,2002,10(5):528-532.CHEN X R,CAI P,SHI W K.The latest development of optical non-contact 3Dprofile measurement[J].Opt.Precision Eng.,2002,10(5):528-532.(in Chinese)
[57] SCHMALTZ G.Technische Oberflchenkunde[M].Berlin,Heidelberg:Springer,1936.
[58] ABOUELATTA O B.3Dsurface roughness measurement using a light sectioning vision system[C].Proceedings of World Congress on Engineering,International Association of Engineers,2010:698-703.
[59]金守峰,陈蓉,范荻,等.机加工表面粗糙度的光切显微成像测量方法与试验研究[J].制造业自动化,2016,38(4):15-19.JIN SH F,CHEN R,FAN D,et al..Measurement and experiment of light-section microscope images on machined surface roughness[J].Manufacturing Automation,2016,38(4):15-19.(in Chinese)
[60]崔凤奎,宋战波,王晓强,等.三维表面粗糙度激光三角法测量原理研究[J].矿山机械,2010,38(14):30-33.CUI F K,SONG ZH B,WANG X Q,et al..Study on principle of laser triangulation used for measurement of 3Dsurface roughness[J].Mining&Processing Equipment,2010,38(14):30-33.(in Chinese)
[61]卢晋人,黄元庆.激光三角法测量表面形貌[J].厦门大学学报:自然科学版,2004,43(1):50-53.LU J R,HUANG Y Q.Laser triangulation method for surface measurement[J].Journal of Xiamen University:Natural Science,2004,43(1):50-53.(in Chinese)
[62]吴剑锋,王文,陈子辰.激光三角法测量误差分析与精度提高研究[J].机电工程,2003,20(5):89-91.WU J F,WANG W,CHEN Z CH.Study on the analysis for error in triangular laser measurement and the method of improving accuracy[J].Mechanical&Electrical Engineering Magazine,2003,20(5):89-91.(in Chinese)
[63]常城,张志峰.激光三角法测量的误差研究[J].中国科技信息,2006(23):61-62,64.CHANG CH,ZHANG ZH F.Study on the error in triangular laser measurement[J].China Science and Technology Information,2006(23):61-62,64.(in Chinese)
[64] LONARDO P M,TRUMPOLD H,DE CHIFFRE L.Progress in 3Dsurface microtopography characterization[J].CIRP Annals,1996,45(2):589-598.
[65] COLOMB T,KRIVEC S,HUTTER H,et al..Digital holographic reflectometry[J].Optics Express,2010,18(4):3719-3731.
[66] MYSHKIN N K,GRIGORIEV A Y,CHIZHIKS A,et al..Surface roughness and texture analysis in microscale[J].Wear,2003,254(10):1001-1009.
[67] THIAN S C H,FENG W,WONG Y S,et al..Dimensional measurement of 3D microstruture based on white light interferometer[C]//Proceedings of the 4th International Symposium on Instrumentation and Science and Technology,Chinese Society for Measurement,CIS,2006:1435.
[68]YOUNG R D.Surface microtopography[J].Physics Today,1971,24(11):42.
[69] SUGANUMA T.Measurement of surface topography using SEM with two secondary electron detectors[J].Journal of Electron Microscopy,1985,34(4):328-337.
[70] BINNIG G,ROHRER H,GERBER C,et al..Tunneling through a controllable vacuum gap[J].Applied Physics Letters,1982,40(2):178-180.
[71]朱星.扫描近场光学显微镜[J].现代科学仪器,1996(4):7-9.ZHU X.Scanning near-field optical microscopy[J].Modern Scientific Instruments,1996(4):7-9.(in Chinese)
[72] DRIG U,POHL D W,ROHNER F.Near-field optical-scanning microscopy[J].Journal of Applied Physics,1986,59(10):3318-3327.
[73] BINNIG G,QUATE C F,GERBERr C.Atomic force microscope[J].Physical Review Letters,1986,56(9):930-933.
[74] DE OLIVEIRA R R L,ALBUQUERQUE D A C,CRUZ T G S,et al..Measurement of the nanoscale roughness by atomic force microscopy:basic principles and applications[M]//BELLITTO V.Atomic Force Microscopy-Imaging,Measuring and Manipulating Surfaces at the Atomic Scale.InTech,2012.
[75] MATHIA T G,PAWLUS P,WIECZOROWSKI M.Recent trends in surface metrology[J].Wear,2011,271(3-4):494-508.
[76]周明宝,林大键,郭履容,等.微结构表面形貌的测量[J].光学精密工程,1999,7(3):7-13.ZHOU M B,LIN D J,GUO L R,et al..Measurement of microstructures topography[J].Opt.Precision Eng.,1999,7(3):7-13.(in Chinese)
[77] HAIDAR Y,DE FORNEL F,ZEROUKI C,et al..Study of the roughness and optical near field of mass surface by using a SNOM with shear-force regulation[J].SPIE,2004,5458:171-182.
[78] NEMOTO K,YANAGI K,AKETAGAWA M,et al..Development of a roughness measurement standard with irregular surface topography for improving 3D surface texture measurement[J].Measurement Science and Technology,2009,20(8):084023.
[79] CONROY M,ARMSTRONG J.A comparison of surface metrology techniques[J].Journal of Physics:Conference Series,2005,13(3):458.
[80]李剑白,李达成,李小芸,等.原子力显微镜测试光学超光滑表面微轮廓的研究[J].光学学报,2000,20(11):1533-1537.LI J B,LI D CH,LI X Y,et al..Study on testing method for microprofile of optical supersmooth surface[J].Acta Optica Sinica,2000,20(11):1533-1537.(in Chinese)
[81] STOUT K J,SULLIVAN P J,DONG W P,et al..The Development of Methods for the Characterisation of Roughness in Three Dimensions[M].Birmingham:ECSC-EEC-EAEC,1993.