平面度计量——点线面之间的量值传递与控制
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摘要
研究了平面度计量中的线和面两种传递路径。针对通过等厚干涉仪的面传递中不能维持平面度指标的原始定义,必须采用光圈(N、ΔN)等指标来描述的问题,在讨论测量点的绝对检验方法的基础上,提出了解决直线和面域上不同的平面度指标体系的统一的方法。分析了《JJG 28—2000平晶》中以点控线和以线控面过程中的假设和附加要求对于传递精度的影响问题,提出了基于相移干涉仪高分辨率和快速测量的优势,采用圆平晶以最大变化正交截面替代国标中随机的"任意"正交截面的方法,从而保证对平晶平面度计量的严谨性要求。
Two transmission pathways of line and plane in flatness metrology were studied. Based on the absolute test of measuring points,a unified method for solving different flatness index systems on straight lines and plane domains was put forward. Aiming at the problem that the original definition of flatness cannot be maintained in circular optical flat witch tested by an equal thickness interferometer,and fringe spacings( N、ΔN) had to used in this scene. The influence on transfer accuracy of hypothesis and additional requirements in 《JJG 28—2000 Optical Flat》which used for defining line with points and defining surface with lines was analyzed. Characteristic orthogonal sections which contain maximum change were proposed to replace the random orthogonal sections in《JJG 28—2000 Optical Flat》. Based on the advantages of high resolution and rapid measurement of phase shifting interferometer,the method to search for the characteristic orthogonal sections was described. So,it can promote the rigorous of flatness in metrology.
Two transmission pathways of line and plane in flatness metrology were studied. Based on the absolute test of measuring points,a unified method for solving different flatness index systems on straight lines and plane domains was put forward. Aiming at the problem that the original definition of flatness cannot be maintained in circular optical flat witch tested by an equal thickness interferometer,and fringe spacings( N、ΔN) had to used in this scene. The influence on transfer accuracy of hypothesis and additional requirements in 《JJG 28—2000 Optical Flat》which used for defining line with points and defining surface with lines was analyzed. Characteristic orthogonal sections which contain maximum change were proposed to replace the random orthogonal sections in《JJG 28—2000 Optical Flat》. Based on the advantages of high resolution and rapid measurement of phase shifting interferometer,the method to search for the characteristic orthogonal sections was described. So,it can promote the rigorous of flatness in metrology.
引文
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[2] Valley J F,Poduje N. The Transition to Optical Wafer Flatness Metrology[C]//Characterization and metrology for ULSI technology. 2003:413-420.
[3] Moona G,Sharma R,Kiran U,et al. Evaluation of measurement uncertainty for absolute flatness measurement by using fizeau interferometer with phaseshifting capability[J]. Mapan,2014,29(4):261-267.
[4]张旭东,贺美云,刘香斌.一种基于Matlab的干涉条纹自动处理方法[J].计量学报,2010,31(1):14-16.Zhang X D,He M Y,Liu X B. A Method of Automatic Interpretation of Interference Fringes Based on Matlab[J]. Acta Metrologica Sinica,2010,31(1):14-16.
[5]王怀颖,于盛林,冯强.一种用细胞神经网络提取干涉条纹中心的新方法[J].计量学报,2006,27(2):119-120.Wang H Y,Yu S L,F Q. CNN for Extracting the Center of Interference-stripes[J]. Acta Metrologica Sinica,2006,27(2):119-120.
[6] JJG661—2004平面等倾干涉仪[S]. 2004.
[7] JJG28—2000平晶[S]. 2000.
[8] GB/T2831—2009光学零件的面形偏差[S]. 2009.
[9]徐德衍,王青,高志山,等.现行光学元件检测与国际标准[M].北京:科学出版社,2009.
[10] Fritz B S. Absolute Calibration of An Optical Flat[J].Optical Engineering,1984,23(4):379-383.
[11] Ai C,Wyant J C,Shao L Z,et al. Method and Apparatus for Absolute Measurement of Entire Surfaces of Flats[P]. US Patent:5 502 566,1996. 03. 26.
[12]王青,徐新华,陈磊,等.一种子孔径拼接系统中系统误差的修正方法[P],中国专利:201110106489. 7,2011. 04. 27.
[13]王青,顾洋.等倾与相移两种干涉仪的平面度绝对测量比对[J].计测技术,2018,38(2):30-33.Wang Q, Gu Y. Absolute Measurement Comparison Between Isoclinic Interferometer and Phase Shift Interferometer[J]. Metrology&Measurement Technology,2018,38(2):30-33.
[2] Valley J F,Poduje N. The Transition to Optical Wafer Flatness Metrology[C]//Characterization and metrology for ULSI technology. 2003:413-420.
[3] Moona G,Sharma R,Kiran U,et al. Evaluation of measurement uncertainty for absolute flatness measurement by using fizeau interferometer with phaseshifting capability[J]. Mapan,2014,29(4):261-267.
[4]张旭东,贺美云,刘香斌.一种基于Matlab的干涉条纹自动处理方法[J].计量学报,2010,31(1):14-16.Zhang X D,He M Y,Liu X B. A Method of Automatic Interpretation of Interference Fringes Based on Matlab[J]. Acta Metrologica Sinica,2010,31(1):14-16.
[5]王怀颖,于盛林,冯强.一种用细胞神经网络提取干涉条纹中心的新方法[J].计量学报,2006,27(2):119-120.Wang H Y,Yu S L,F Q. CNN for Extracting the Center of Interference-stripes[J]. Acta Metrologica Sinica,2006,27(2):119-120.
[6] JJG661—2004平面等倾干涉仪[S]. 2004.
[7] JJG28—2000平晶[S]. 2000.
[8] GB/T2831—2009光学零件的面形偏差[S]. 2009.
[9]徐德衍,王青,高志山,等.现行光学元件检测与国际标准[M].北京:科学出版社,2009.
[10] Fritz B S. Absolute Calibration of An Optical Flat[J].Optical Engineering,1984,23(4):379-383.
[11] Ai C,Wyant J C,Shao L Z,et al. Method and Apparatus for Absolute Measurement of Entire Surfaces of Flats[P]. US Patent:5 502 566,1996. 03. 26.
[12]王青,徐新华,陈磊,等.一种子孔径拼接系统中系统误差的修正方法[P],中国专利:201110106489. 7,2011. 04. 27.
[13]王青,顾洋.等倾与相移两种干涉仪的平面度绝对测量比对[J].计测技术,2018,38(2):30-33.Wang Q, Gu Y. Absolute Measurement Comparison Between Isoclinic Interferometer and Phase Shift Interferometer[J]. Metrology&Measurement Technology,2018,38(2):30-33.