基于一维PSD的高速摆镜角速度测量方法
|
摘要
为了实现高速摆镜角速度的精准测量,设计了基于一维PSD的摆镜角速度测量系统。采用线激光器作为光源,摆镜将光束反射到PSD探测器上,根据PSD上光斑位置计算镜面偏转角度,并通过相邻角度之间的时间间隔得到角速度。实验结果表明:测量系统动态采样频率可以达到7. 5 k Hz,角度分辨力优于0. 4″,角位移测量结果的三倍标准差为7. 8″,角速度测量误差在±5%以内。系统实现了高动态,高精度,非接触角度测量,满足了高速摆镜角速度测量要求。
In order to measure the angular velocity of a high-speed swing mirror accurately,a swing mirror angular velocity measurement system based on one-dimensional PSD is designed. The system uses a line laser as the light source,and the mirror reflects the beam onto the PSD detector. The mirror deflection angle is calculated according to the position of the spot on the PSD,and the angular velocity is obtained by the time interval between adjacent angles.The experimental results show that the dynamic sampling frequency of the measurement system can reach 7. 5 kHz,the angular resolution is less than 0. 4 ",the three times standard deviation of the angular displacement measurement is7. 8",and the angular velocity measurement error is within( 5%. The system achieves high dynamic,high precision and non-contact angle measurement,which meets the requirements of high speed swing mirror angular velocity measurement.
In order to measure the angular velocity of a high-speed swing mirror accurately,a swing mirror angular velocity measurement system based on one-dimensional PSD is designed. The system uses a line laser as the light source,and the mirror reflects the beam onto the PSD detector. The mirror deflection angle is calculated according to the position of the spot on the PSD,and the angular velocity is obtained by the time interval between adjacent angles.The experimental results show that the dynamic sampling frequency of the measurement system can reach 7. 5 kHz,the angular resolution is less than 0. 4 ",the three times standard deviation of the angular displacement measurement is7. 8",and the angular velocity measurement error is within( 5%. The system achieves high dynamic,high precision and non-contact angle measurement,which meets the requirements of high speed swing mirror angular velocity measurement.
引文
[1]徐新行,杨洪波,王兵,等.快速反射镜关键技术研究[J].激光与红外,2013,(10):1095-1103.
[2] GERMANN L M,BRACCIO J. Fine-steering mirror technology supports 10 nanoradian systems[J]. Optical Engineering,1990,29(11):1351-1359.
[3]蔡怀宇,梁志敏,黄战华,等.高频摆镜的多时序闪频激光测试[J].光电工程,2018,(7):66-73.
[4] MANCINI D,CASCONE E,SCHIPANI P. Galileo highresolution encoder system[J]. SPIE,2011,3112:328-334.
[5]李金阳,吴简彤,韩慧群.小角度测量的光学方法及应用[J].应用科技,2006(7):15-18.
[6]浦昭邦,陶卫,张琢.角度测量的光学方法[J].光学技术,2002(2):168-171.
[7]殷东羽.基于数字图像的扫描镜动态精度测量方法研究[D].上海:中国科学院研究生院(上海技术物理研究所),2016.
[8] ZHOU Q,BEN-TZVI P,FAN D,et al. Design of Fast Steering Mirror systems for precision laser beams steering[C]//International Workshop on Robotic&Sensors Environments. 2008.
[9] ZHANG Guoyu,JIANG Huilin,XU Xiping,et al.Laser dynamic testing method for swing angle of scanning mirror of infrared earth sensor[J]. Acta Optica Sinica,2007,27(5):875.
[10] SAITO Y,GAO W,KIYONO S.A Single Lens Micro-Angle Sensor[J].International Journal of Precision Engineering&Manufacturing,2007,8(2):14-19.
[11]王洋,颜昌翔,胡春晖,等.非接触式扫描反射镜转角测量系统[J].光学精密工程,2014,(4):850-855.
[12] KIYONO S,ASAKAWA Y,INAMOTO M,et al.A differential laser autocollimation probe for on-machine measurement[J].Precision Engineering,1993,15(2):68-76.
[13]朱国力,吴学兵,邹万军.基于PSD的角度测量系统[J].电测与仪表,2006,(1):29-32.
[14]王海月,王艳林,陈青山,等.采用旋转光程法提高PSD微小角度测量分辨率[J].激光杂志,2018,(1):100-103.
[15]黄梅珍.位置敏感探测器的研究[D].浙江:浙江大学,2001.
[2] GERMANN L M,BRACCIO J. Fine-steering mirror technology supports 10 nanoradian systems[J]. Optical Engineering,1990,29(11):1351-1359.
[3]蔡怀宇,梁志敏,黄战华,等.高频摆镜的多时序闪频激光测试[J].光电工程,2018,(7):66-73.
[4] MANCINI D,CASCONE E,SCHIPANI P. Galileo highresolution encoder system[J]. SPIE,2011,3112:328-334.
[5]李金阳,吴简彤,韩慧群.小角度测量的光学方法及应用[J].应用科技,2006(7):15-18.
[6]浦昭邦,陶卫,张琢.角度测量的光学方法[J].光学技术,2002(2):168-171.
[7]殷东羽.基于数字图像的扫描镜动态精度测量方法研究[D].上海:中国科学院研究生院(上海技术物理研究所),2016.
[8] ZHOU Q,BEN-TZVI P,FAN D,et al. Design of Fast Steering Mirror systems for precision laser beams steering[C]//International Workshop on Robotic&Sensors Environments. 2008.
[9] ZHANG Guoyu,JIANG Huilin,XU Xiping,et al.Laser dynamic testing method for swing angle of scanning mirror of infrared earth sensor[J]. Acta Optica Sinica,2007,27(5):875.
[10] SAITO Y,GAO W,KIYONO S.A Single Lens Micro-Angle Sensor[J].International Journal of Precision Engineering&Manufacturing,2007,8(2):14-19.
[11]王洋,颜昌翔,胡春晖,等.非接触式扫描反射镜转角测量系统[J].光学精密工程,2014,(4):850-855.
[12] KIYONO S,ASAKAWA Y,INAMOTO M,et al.A differential laser autocollimation probe for on-machine measurement[J].Precision Engineering,1993,15(2):68-76.
[13]朱国力,吴学兵,邹万军.基于PSD的角度测量系统[J].电测与仪表,2006,(1):29-32.
[14]王海月,王艳林,陈青山,等.采用旋转光程法提高PSD微小角度测量分辨率[J].激光杂志,2018,(1):100-103.
[15]黄梅珍.位置敏感探测器的研究[D].浙江:浙江大学,2001.