基于C-PDMS介质层的柔性电容式传感器研究
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摘要
为了提高电容式传感器的灵敏度,设计了一种"三明治"结构的电容式压力传感器,其以柔性材料聚二甲基硅氧烷与导电颗粒乙炔黑的混合物为介质层,以溅射在聚对苯二甲酸乙二酯上金属氧化铟锡的导电膜作上下层电极。利用渗流理论,研究乙炔黑对基于PDMS薄膜的电容式压力传感器的灵敏度、动态响应及响应速率的影响。实验结果表明:在8 kPa压强范围内混合2.5 wt%乙炔黑的C-PDMS复合物薄膜的灵敏度为0.7 kPa~(-1),动态响应时间小于180 ms,在100次弯折后灵敏度几乎保持不变,有良好的稳定性。
In order to improve the sensitivity,a capacitive sensor with a "sandwich" structure was proposed.It took the mixture of polymethylsiloxane(PDMS),a kind of flexible materials,and acetylene black(C),a kind of conductive particle as the dielectric layer,and the conductive thin film of indium tin oxide(ITO) that was sputtered on the poly(ethylene terephthalate two ester)(PET) as the upper and lower electrode.The purpose was to study the influence of acetylene black on the sensitivity,dynamic response and response rate of capacitive pressure sensor based on PDMS film by using percolation theory.The experiment results show that the sensitivity of the C/PDMS composite film mixed with 2.5 wt% acetylene black is 0.7 kPa~(-1) in the range of 8 kPa pressure,and the dynamic response time is less than 180 ms.After 100 bending cycles,the sensitivity is almost unchanged with good stability.
In order to improve the sensitivity,a capacitive sensor with a "sandwich" structure was proposed.It took the mixture of polymethylsiloxane(PDMS),a kind of flexible materials,and acetylene black(C),a kind of conductive particle as the dielectric layer,and the conductive thin film of indium tin oxide(ITO) that was sputtered on the poly(ethylene terephthalate two ester)(PET) as the upper and lower electrode.The purpose was to study the influence of acetylene black on the sensitivity,dynamic response and response rate of capacitive pressure sensor based on PDMS film by using percolation theory.The experiment results show that the sensitivity of the C/PDMS composite film mixed with 2.5 wt% acetylene black is 0.7 kPa~(-1) in the range of 8 kPa pressure,and the dynamic response time is less than 180 ms.After 100 bending cycles,the sensitivity is almost unchanged with good stability.
引文
[1] TRUNG T Q,LEE N E.Flexible and stretchable physical sensor integrated platforms for wearable human-activity monitoringand personal healthcare[J].Advanced Materials,2016,28(22):4338-4372.
[2] CHOI C,CHOI M K,HYEON T,et al.Nanomaterial-based soft electronics for healthcare applications[J].Chemnanomat,2016,2(11):1006-1017.
[3] SEGEVBAR M,LANDMAN A,NIRSHAPIRA M,et al.Tunable touch sensor and combined sensing platform:toward nanoparticle-based electronic skin.[J].Acs Appl Mater Interfaces,2013,5(12):5531-5541.
[4] 余建平,张玉良,周兆忠.浮动电极式三维柔性电容触觉传感阵列设计[J].仪表技术与传感器,2015(5):11-14.
[5] 李颖,张治国,张娜,等.硅电容微差压敏感器件封装工艺研究[J].仪表技术与传感器,2013(12):138-140.
[6] 杨航,董维杰.基于压电薄膜传感器的肘部运动检测系统设计[J].电子产品世界,2017(1):41-43.
[7] MANNSFELD S C,TEE B C,STOLTENBERG R M,et al.Highly sensitive flexible pressure sensors with microstructured rubber dielectric layers[J].Nature Materials,2010,9(10):859.
[8] LI T,LUO H,QIN L,et al.Flexible capacitive tactile sensor based on micropatterned dielectric layer[J].Small,2016,12(36):5042.
[9] JANG H,YOON H,KO Y,et al.Enhanced performance in capacitive force sensors using carbon nanotube/polydimethylsiloxane nanocomposites with high dielectric properties[J].Nanoscale,2016,8(10):5667-5675.
[10] RANA A,ROBERGE J P,DUCHAINE V.An improved soft dielectric for a highly sensitive capacitive tactile sensor[J].IEEE Sensors Journal,2016,16(22):7853-7863.
[2] CHOI C,CHOI M K,HYEON T,et al.Nanomaterial-based soft electronics for healthcare applications[J].Chemnanomat,2016,2(11):1006-1017.
[3] SEGEVBAR M,LANDMAN A,NIRSHAPIRA M,et al.Tunable touch sensor and combined sensing platform:toward nanoparticle-based electronic skin.[J].Acs Appl Mater Interfaces,2013,5(12):5531-5541.
[4] 余建平,张玉良,周兆忠.浮动电极式三维柔性电容触觉传感阵列设计[J].仪表技术与传感器,2015(5):11-14.
[5] 李颖,张治国,张娜,等.硅电容微差压敏感器件封装工艺研究[J].仪表技术与传感器,2013(12):138-140.
[6] 杨航,董维杰.基于压电薄膜传感器的肘部运动检测系统设计[J].电子产品世界,2017(1):41-43.
[7] MANNSFELD S C,TEE B C,STOLTENBERG R M,et al.Highly sensitive flexible pressure sensors with microstructured rubber dielectric layers[J].Nature Materials,2010,9(10):859.
[8] LI T,LUO H,QIN L,et al.Flexible capacitive tactile sensor based on micropatterned dielectric layer[J].Small,2016,12(36):5042.
[9] JANG H,YOON H,KO Y,et al.Enhanced performance in capacitive force sensors using carbon nanotube/polydimethylsiloxane nanocomposites with high dielectric properties[J].Nanoscale,2016,8(10):5667-5675.
[10] RANA A,ROBERGE J P,DUCHAINE V.An improved soft dielectric for a highly sensitive capacitive tactile sensor[J].IEEE Sensors Journal,2016,16(22):7853-7863.