线轮廓检测设备偏差校准方法研究
|
摘要
分析了线轮廓检测设备存在的偏差种类及其产生原因,提出了一种检测设备线轮廓偏差的校准方法。首先,将各偏差的初始校准值补偿至采集到的数据中,利用广义逆矩阵求解不相容线性方程组的最佳逼近解,得到轮廓线的拟合函数;然后以最小二乘原则为评定准则,计算找到最优校准值;最后将最优校准值输入到检测系统中进行偏差校准。工程中利用美国ZYGO公司的激光干涉仪测量结果作为产品轮廓线的参考值,经过该方法校准后,检测设备的测量值与参考值的误差减小约90%,可见该方法提高了测量精度。该方法已应用于某非标自动化公司中的检测设备,在工程应用中的使用进而证明了所提出的偏差校准方法可行有效。
Deviation types of linear contour equipment and its causes are analyzed. A deviation calibration method for line contour of testing equipment is presented. Firstly,the initial calibration value of each deviation is compensated separately to the collected data. Based on the generalized inverse matrix solving the optimal approximation solution of incompatible linear equations,the fitting function of the contour line is obtained. Then,the principle of least squares is used as the evaluation criteria to get the optimum calibration values. Finally,the optimum calibration values are input to the detection system for deviation calibration. To verify the method,the measurement results of the laser interferometer of ZYGO are used as the reference value of the products. After applying proposed method,the error between the measured value and the reference value is reduced by about 90%,which proves its ability for measurement precision improvement. The validity of this method has been further confirmed by its application in detection equipment application of a non-standard automation company in Suzhou.
Deviation types of linear contour equipment and its causes are analyzed. A deviation calibration method for line contour of testing equipment is presented. Firstly,the initial calibration value of each deviation is compensated separately to the collected data. Based on the generalized inverse matrix solving the optimal approximation solution of incompatible linear equations,the fitting function of the contour line is obtained. Then,the principle of least squares is used as the evaluation criteria to get the optimum calibration values. Finally,the optimum calibration values are input to the detection system for deviation calibration. To verify the method,the measurement results of the laser interferometer of ZYGO are used as the reference value of the products. After applying proposed method,the error between the measured value and the reference value is reduced by about 90%,which proves its ability for measurement precision improvement. The validity of this method has been further confirmed by its application in detection equipment application of a non-standard automation company in Suzhou.
引文
[1]王泓晖,刘日良,张承瑞.基于加工特征的车间可重构式自动编程系统设计与实现[J].计算机集成制造系统,2016,22(10):2396-2407.
[2]李鹏,马孜,陈余庆,等,加工中心定位误差的设计与补偿[J].组合机床与自动化加工技术,2012(6):20-24.
[3]王宁,段振云,赵文辉,等,视觉检测中齿轮外轮廓分段方法研究[J].组合机床与自动化加工技术,2016(4):117-120.
[4]李顺,巩岩.长程轮廓仪用于筒状超光滑表面测量的误差分析及校正[J].光学学报,2011,31(11):117-123.
[5]袁峰.浅谈机械手治具的人工治具段取与机械手治具快速段取器的实践操作[J].科技资讯,2012(22):106-107.
[6]周笋,吉国力.基于改进BP算法的广义逆矩阵求解方法[J].厦门大学学报(自然版),2003,42(3):386-389.
[7]李宏年.不相容线性方程组的最小二乘解[J].青海大学学报,2002,20(1):49-50.
[8]王宇春,孙和义,唐文彦,等.最小条件下一般二次曲面轮廓度误差的评定[J].仪器仪表学报,2014,35(8):1803-1809.
[9]张进,王仲,李超,等,离散点的线轮廓度评价算法[J].光学精密工程,2008,16(11):2281-2285.
[10]于大国,宁磊,孟晓华.基于最小二乘法深孔轴线直线度误差评定[J].组合机床与自动化加工技术,2014(1):39-41.
[2]李鹏,马孜,陈余庆,等,加工中心定位误差的设计与补偿[J].组合机床与自动化加工技术,2012(6):20-24.
[3]王宁,段振云,赵文辉,等,视觉检测中齿轮外轮廓分段方法研究[J].组合机床与自动化加工技术,2016(4):117-120.
[4]李顺,巩岩.长程轮廓仪用于筒状超光滑表面测量的误差分析及校正[J].光学学报,2011,31(11):117-123.
[5]袁峰.浅谈机械手治具的人工治具段取与机械手治具快速段取器的实践操作[J].科技资讯,2012(22):106-107.
[6]周笋,吉国力.基于改进BP算法的广义逆矩阵求解方法[J].厦门大学学报(自然版),2003,42(3):386-389.
[7]李宏年.不相容线性方程组的最小二乘解[J].青海大学学报,2002,20(1):49-50.
[8]王宇春,孙和义,唐文彦,等.最小条件下一般二次曲面轮廓度误差的评定[J].仪器仪表学报,2014,35(8):1803-1809.
[9]张进,王仲,李超,等,离散点的线轮廓度评价算法[J].光学精密工程,2008,16(11):2281-2285.
[10]于大国,宁磊,孟晓华.基于最小二乘法深孔轴线直线度误差评定[J].组合机床与自动化加工技术,2014(1):39-41.