考虑范德华力的微型活齿传动系统应力分析
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摘要
提出了一种微型集成活齿传动系统,介绍了其工作原理,推导了微尺度下任一活齿在不同啮合位置的静力学方程,利用范德华势函数对活齿所受的范德华力进行求解,研究了考虑范德华力时啮合活齿所受波发生器、活齿架、中心轮三者作用力的变化规律;运用Hertz理论,对活齿与波发生器、活齿架、中心轮的接触应力进行了理论推导,并研究了微结构不同几何参数对活齿所受作用力及接触应力规律的影响。
A micro-integrated movable tooth transmission system was introduced herein and the working principles were introduced. The static equations of any movable teeth at different meshing positions in micro-scale were deduced. The Van der Waals forces on movable teeth were solved by Van der Waals potential functions. The variation of the forces acting on the movable teeth from the wave generator, the movable tooth rack and the center wheel was studied when considering the Van der Waals forces. By using the Hertz theory, the forces of the movable teeth from the wave generator, the contact stress were deduced theoretically and the effects of different geometric parameters of the microstructure on the forces and contact stress of the movable teeth were studied.
A micro-integrated movable tooth transmission system was introduced herein and the working principles were introduced. The static equations of any movable teeth at different meshing positions in micro-scale were deduced. The Van der Waals forces on movable teeth were solved by Van der Waals potential functions. The variation of the forces acting on the movable teeth from the wave generator, the movable tooth rack and the center wheel was studied when considering the Van der Waals forces. By using the Hertz theory, the forces of the movable teeth from the wave generator, the contact stress were deduced theoretically and the effects of different geometric parameters of the microstructure on the forces and contact stress of the movable teeth were studied.
引文
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[19]张文明,孟光.静电微电机微转子接触动力学特性分析[J].力学学报,2005,37(6):756-763.ZHANG Wenming,MENG Guang.Contact Dynamics of Themic-rorotor in Electrostatic Micromotor[J].Acta Mechanica Sinica,2005,37(6):756-763.
[20]许兴中,赵钢,刘勇,等.聚甲基丙烯酸甲酯薄膜的弹性模量测量研究[J].现代制造工程,2011(8):1-5.XU Xingzhong,ZHAO Gang,LIU Yong,et al.Determination for the Elastic Modulus of the PM-MA Thin Film[J].Modern Manufacturing Engineering,2011,31(8):1-5.(编辑袁兴玲)
[2]KAGAN D,BENCHIMOL M J,CLAUSSEN J C,et al.Acoustic Droplet Vaporization and Propulsion of Perfluoro Carbon Loaded Microbullets for Targeted Tissue Penetration and Deformation[J].Angew.Chem.Int.Ed.,2012,51:7519-7522.
[3]GARCA A M,OROZCO J,GUIX M,et al.Micromotor-based Lab-on-chip Immunoassays[J].Nanoscale,2013,5(4):1325-1331.
[4]MHANNA R,QIU F,ZHANG L,et al.Artificial Bacterial Flagella for Remote-controlled Targeted Single-cell Drug Delivery[J].Small,2014,10(10):1953.
[5]MA Xing,SANCHEZ S.Bio-catalytic Mesoporous Janus Nanomotors Powered by Catalase Enzyme[J].Tetrahedron,2017,73:4883-4886.
[6]TU Y,PENG F,SUI X,et al.Self-propelled Supramolecular Nanomotors with Temperature Responsive Speed Regulation.[J].Nature Chemistry,2017,9(5):480.
[7]李瑰贤,杨伟君,顾晓华.滚柱活齿传动的啮合理论及齿廓接触区数值仿真[J].哈尔滨理工大学学报,2001,6(4):28-31.LI Guixian,Yang Weijun,GU Xaohua.Study on Mesh Theory of Roller Oscillating Tooth Gear Drive and Numerical Value Simulation of Tooth Profile Contact Area[J].Journal of Harbin University of Science&Technology,2001,6(4):28-31.
[8]CHAUPNIAK A,MORALESNARVEZ E,MERKOCI A.Micro and Nanomotors in Diagnostics[J].Advanced Drug Delivery Reviews,2015,95:104.
[9]DELRIO F W,de BOER M P,KNAPP J A,et al.The Role of Van der Waals Forces in Adhesion of Micromachined Surfaces[J].Nature Materials,2005,4(8):629-634.
[10]金凯,何野,陈建军,等.基于集总参数模型的MEMS开关的研究[J].化工自动化及仪表,2012,39(7):37-39.JIN Kai,HE Ye,CHEN Jianjun,et al.Study on MEMS Switches Based on Lumped Parameter Model[J].Control&Instruments in Chemical Industry,2012,39(7):37-39.
[11]ZHOU S A.On Forces in Microelectromechanical Systems[J].International Journal of Engineering Science,2003,41(3/5):313-335.
[12]GADY B,SCHLEEF D,REIFENBERGER R,et al.Identification of Electrostatic and Van Der Waals Interaction Forces between a Micrometersize Sphere and a Flat Substrate[J].Phys.Rev.BCondens Matter,1996,53(12):8065-8070.
[13]李瑰贤,彭云峰.微机械中微观力的几个关键问题分析[J].哈尔滨工业大学学报,2006,38(8):1318-1322.LI Guixian,Peng Yunfeng.Analysis of Microforces in MEMS[J].Journal of HarbinInstitute of Technology,2006,38(8):1318-1322.
[14]张文明.微机电系统(MEMS)动力学特性研究[D].上海:上海交通大学,2008.ZHANG Wenming.Research on Micro-electro-mechanical Systems(MEMS)Dynamics Characteristics[D].Shanghai:Shanghai Jiao Tong University,2008.
[15]KNOLL J,NIRSCHL H.Influence of the Magnetic Force on the Van der Waals Force of Superpara-magnetic Composite Particles[J].Powder Technology,2014,259(2):30-36.
[16]丁肇棣,曲继方.波齿传动的受力分析和效率计算[J].燕山大学学报,1988,12(2):31-35.DING Zhaodi,QU Jifang.Force Analysis and Efficiency Calculation of Wave Gear Transmission[J].Journal of Yanshan University,1988,12(2):31-35.
[17]丁肇棣,曲继方,魏彤,等.圆柱活齿传动的强度计算[J].燕山大学学报,1996,20(4):292-297.DING Zhaodi,QUJifang,WEI Tong,et al.Calculation of Strength of the Oscillting Tooth Trasmission[J].Journal of Yanshan University,1996,20(4):292-297.
[18]JOHNSON K L.接触力学[M].徐秉业等,译.北京:高等教育出版社,1992.JOHNSON K L.Contact Mechanics[M].Translated by XU Binye.Beijing:Higher Education Press,1992.
[19]张文明,孟光.静电微电机微转子接触动力学特性分析[J].力学学报,2005,37(6):756-763.ZHANG Wenming,MENG Guang.Contact Dynamics of Themic-rorotor in Electrostatic Micromotor[J].Acta Mechanica Sinica,2005,37(6):756-763.
[20]许兴中,赵钢,刘勇,等.聚甲基丙烯酸甲酯薄膜的弹性模量测量研究[J].现代制造工程,2011(8):1-5.XU Xingzhong,ZHAO Gang,LIU Yong,et al.Determination for the Elastic Modulus of the PM-MA Thin Film[J].Modern Manufacturing Engineering,2011,31(8):1-5.(编辑袁兴玲)