HTCC电化学H_2S传感器制备及其性能分析
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摘要
采用高温共烧陶瓷(HTCC)工艺技术,设计并制备了电化学气体传感器,该传感器具有结构简单、尺寸小、重量轻等特点。运用电化学工作站对传感器的响应特性进行分析,结果显示:所测电化学气体传感器对H_2S气体响应良好,在H_2S传感器的量程范围(0～100)×10~(-6)内,传感器的响应输出值与H_2S气体体积分数呈现良好的线性关系,线性相关参数0. 997 55,精度优于±1. 5%FS,传感器对气体的响应速度较快,响应时间τ_(90)不大于10 s。通过匹配不同离子液体可实现不同种类气体的检测。此外,HTCC工艺成熟,可实现传感器的批量化制备。
A new type of electrochemical gas sensor is designed and fabricated by using HTCC technology. The prepared sensor has characteristics such as simple structure,small size,light weight,etc. An electrochemical workstation is used to analyze on response characteristics of sensor. The results show that the gas sensor has good response to H_2 S gas in range of( 0～ 100) × 10~(-6) volume fraction,the gas sensor has a good linear relationship with volume fraction of H_2 S in the measurement range of the sensor,linear correlation coefficient 0. 997 55,the measurement precision is prior to ± 1. 5 % FS,electrochemical gas sensor has the characteristics of fast response,the response time τ_(90)≤10 s. It can detect different kinds of gases by selecting different ionic liquid. In addition,batch fabrication of sensors can be realized by mature HTCC process.
A new type of electrochemical gas sensor is designed and fabricated by using HTCC technology. The prepared sensor has characteristics such as simple structure,small size,light weight,etc. An electrochemical workstation is used to analyze on response characteristics of sensor. The results show that the gas sensor has good response to H_2 S gas in range of( 0～ 100) × 10~(-6) volume fraction,the gas sensor has a good linear relationship with volume fraction of H_2 S in the measurement range of the sensor,linear correlation coefficient 0. 997 55,the measurement precision is prior to ± 1. 5 % FS,electrochemical gas sensor has the characteristics of fast response,the response time τ_(90)≤10 s. It can detect different kinds of gases by selecting different ionic liquid. In addition,batch fabrication of sensors can be realized by mature HTCC process.
引文
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[3] WASILEWSKI T,GE BICKI J,KAMYSZ W. Prospects of ionic liquids application in electronic and bioelectronic nose instruments[J]. Trends in Analytical Chemistry,2017,93:23-36.
[4] PANG X B,SHAW M D,GILLOT S,et al. The impacts of water vapour and co-pollutants on the performance of electrochemical gas sensors used for air quality monitoring[J]. Sensors and Actuators B:Chemical,2018,266:674-684.
[5]于文双,刘玲,郭昀,等. H2S电化学气体传感器的敏感特性评价[J].上海大学学报,2015,21(1):47-53.
[6]吴玉锋,田彦文,韩元山,等.气体传感器研究进展和发展方向[J].计算机测量与控制,2003(10):731-734.
[7]潘小青,刘庆成.气体传感器及其发展[J].东华理工学院学报,2004(1):89-93.
[8]李广伟,鲁俊民,秦东振,等.离子液体在电流型电化学气体传感器中的应用[J].化工进展,2013,32(10):2409-2415.
[9]李颖,付金宇,侯永超.有害气体检测的电化学技术的应用发展[J].科学技术与工程,2018,18(3):132-141.
[10] TONIOLO R,BORTOLOMEAZZI R,SVIGELJ R,et al. Use of an electrochemical room temperature ionic liquid-based microprobe for measurements in gaseous atmospheres[J]. Sensors and Actuators B:Chemical,2017,240:239-247.
[11]郭萌.电化学传感器的研究[D].天津:天津大学,2005.
[12] HANCKE J L,BURGOS R A,AHUMADA F. Schisandra chinensis(Turcz.)baill[J]. Fitoterapia,1999,70:451.
[13]龙乐.低温共烧陶瓷基板及其封装应用[J].电子与封装,2006,6(11):5-9.
[14]童志义.低温共烧陶瓷技术现状与趋势[J].电子工业专用设备,2008,237(11):1-9.
[15]秦浩,王洋洋,杨永超,等.开放式快响应电化学NH3传感器研制[J].传感器与微系统,2018,37(9):81-83.
[16]王洋洋,秦浩,杨永超,等.电化学多组分气体传感器设计与性能分析[J].传感器与微系统,2018,37(11):87-89.