SPC在高纯特气生产中的应用
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摘要
结合高纯特气实际生产过程中的特点,介绍了统计过程控制(SPC)在高纯特气生产过程管控中的应用,分析了单值-移动极差控制图和不相等样本容量的均值-全距控制图的应用。认为SPC是建立在时间先后顺序上的过程管控,只有先后顺序清晰制定SPC控制图才能真实的反应过程情况,过程能力指数分析需要结合SPC控制图才能准确的表征一个过程的实际能力。SPC的应用有助于高纯特气体生产过程的管控和产品品质的改善。
Combined with the particularity of the high-purity special gas industry,this paper introduced how to apply statistics process control(SPC)to the special gas production process control,that mainly explain the process step of I-MR control chart and ■ control chart of unequal sample size.SPC is believed to be a process control method based on time sequence,which would only be function when the data was in clear order.Process capability index analysis needs to be combined with control chart to truly characterize the actual capability of a process.It helps to improve process control and product quality
Combined with the particularity of the high-purity special gas industry,this paper introduced how to apply statistics process control(SPC)to the special gas production process control,that mainly explain the process step of I-MR control chart and ■ control chart of unequal sample size.SPC is believed to be a process control method based on time sequence,which would only be function when the data was in clear order.Process capability index analysis needs to be combined with control chart to truly characterize the actual capability of a process.It helps to improve process control and product quality
引文
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[2]王巍,吴志刚.APC技术在刻蚀工艺过程控制中的研究进展[J].中国集成电路,2007,16(2):68-71.
[3]颜鑫敏.SPC技术在半导体硅片制造中的应用[J].企业技术发展,2014,33(28):51-52.
[4] ASQC/AIAG编写组.测量系统分析(MSA)参考手册[M] 4版.戴姆勒克莱斯公司,福特公司,通用汽车公司,2010.
[5] ASQC/AIAG编写组.统计过程控制(SPC)参考手册[M] 2版.戴姆勒克莱斯公司,福特公司,通用汽车公司,2005.