基于Ag/CNTs-PDMS的高灵敏度柔性压力传感器研制及性能测试
|
摘要
智能传感的应用对柔性压力传感器的需求量和性能提出了更高的要求,因此,需要开发一种简单、廉价、可批量化的方法实现大范围、高灵敏压力传感器的制造。文章基于压阻效应,采用浸渍-干燥法制备了一种基于镀银碳纳米管-聚二甲基硅氧烷(Ag/CNTs-PDMS)复合结构的柔性压力传感器。研究表明,所制备的压力传感器具有较高的灵敏度(0.718 kPa~(-1))、较宽的工作范围(40 kPa)、较短的响应时间(1.14 s)以及良好的可重复性,有望用于在轨实时压力监测。
The realization of intelligent sensing involves high requirements on the number and the performance of flexible pressure sensors, Therefore, it is nessary to develop a simple, inexpensive, and scalable method for manufacturing the sensors with high sensitivity and relatively large scope. A flexible piezoresistive pressure sensor is developed based on the silver/carbon nanotubes-polydimethylsiloxane(Ag/CNTs-PDMS)composite prepared by the cube sugar template method and with the dip-drying process. The test result indicates that the thus developed sensor has a most high sensitivity of 0.718 kPa~(-1), a wide working range(up to 40 kPa), a short response time of 1.14 s, as well as a good repeatability. Owing to its good sensing properties, this sensor has a potential application in the detection of pressure in real-time.
The realization of intelligent sensing involves high requirements on the number and the performance of flexible pressure sensors, Therefore, it is nessary to develop a simple, inexpensive, and scalable method for manufacturing the sensors with high sensitivity and relatively large scope. A flexible piezoresistive pressure sensor is developed based on the silver/carbon nanotubes-polydimethylsiloxane(Ag/CNTs-PDMS)composite prepared by the cube sugar template method and with the dip-drying process. The test result indicates that the thus developed sensor has a most high sensitivity of 0.718 kPa~(-1), a wide working range(up to 40 kPa), a short response time of 1.14 s, as well as a good repeatability. Owing to its good sensing properties, this sensor has a potential application in the detection of pressure in real-time.
引文
[1]PARK J J,HYUN W J,MUN S C,et al.Highly stretchable and wearable graphene strain sensors with controllable sensitivity for human motion monitoring[J].ACS Applied Materials&Interfaces,2015,7(11):6317-6324
[2]LEVI A,PIOVANELLI M,FURLAN S,et al.Transparent,electronic skin for distributed and multiple pressure sensing[J].Sensors,2013,13(5):6578-6604
[3]KIM D H,KIM Y S,WU J,et al.Ultrathin silicon circuits with strain-isolation layers and mesh layouts for highperformance electronics on fabric,vinyl,leather,and paper[J].Advanced Materials,2009,21(36):3703-3707
[4]FRUTIGER A,MUTH J T,VOGT D M,et al.Capacitive soft strain sensors via multicore-shell fiber printing[J].Advanced Materials,2015,27(15):2440-2446
[5]YAMADA T,HAYAMIZU Y,YAMAMOTO Y,et al.Astretchable carbon nanotube strain sensor for humanmotion detection[J].Nature Nanotechnology,2011,6(5):296-301
[6]HEMPEL M,NEZICH D,KONG J,et al.A novel class of strain gauges based on layered percolative films of 2Dmaterials[J].Nano Letters,2012,12(11):5714-5718
[7]PARK W T,MALLON J R,RASTEGAR A J,et al.Review:Semiconductor piezoresistance for microsystems[J].Proc IEEE,2009,97(3):513-552
[8]DI C A,ZHANG F,ZHU D.Multi-functional integration of organic field-effect transistors(OFETs):advances and perspectives[J].Advanced Materials,2013,25(3):313-330
[9]SCHWARTZ G,TEE B C,MEI J,et al.Flexible polymer transistors with high pressure sensitivity for application in electronic skin and health monitoring[J].Nature Communications,2013,4(5):1859
[10]MANNSFELD S C B,TEE B C K,STOLTENBERG R M,et al.Highly sensitive flexible pressure sensors with microstructured rubber dielectric layers[J].Nature Materials,2010,9(10):859-864
[11]SOMEYA T,SEKITANI T,IBA S,et al.A large-area,flexible pressure sensor matrix with organic field-effect transistors for artificial skin applications[J].Proceedings of the National Academy of Sciences of the United States of America,2004,101(27):9966-9970
[12]TAKEI K,TAKAHASHI T,HO J C,et al.Nanowire active-matrix circuitry for low-voltage macroscale artificial skin[J].Nature Materials,2010,9(10):821-826
[13]PANG C,LEE G Y,KIM T I,et al.A flexible and highly sensitive strain-gauge sensor using reversible interlocking of nanofibres[J].Nature Materials,2012,11(9):795-801
[14]FRADEN J.Handbook of modern sensors:physics,design and applications[M].4th ed.New York:Springer,1996:59
[15]KING M G,BARAGWANATH A J,ROSAMOND M C,et al.Porous PDMS force sensitive resistors[J].Procedia Chemistry,2009,1(1):568-571
[16]HAN J W,KIM B,LI J,et al.Flexible,compressible,hydrophobic,floatable,and conductive carbon nanotubepolymer sponge[J].Applied Physics Letters,2013,102(5):051903
[17]LIANG H W,GUAN Q F,ZHU Z,et al.Highly conductive and stretchable conductors fabricated from bacterial cellulose[J].NPG Asia Materials,2012,4:19
[18]YAO H B,HUANG G,CUI C H,et al.Macroscale elastomeric conductors generated from hydrothermally synthesized metal-polymer hybrid nanocable sponges[J].Advanced Materials,2011,23(45):3643-3647
[19]SONG Y,CHEN H T,SU Z M,et al.Highly compressible integrated supercapacitor-piezoresistance-sensor system with CNT-PDMS Sponge for health monitoring[J].Small,2017,13(39):1702091
[20]QIU L,LIU J Z,CHANG S L Y,et al.Biomimetic superelastic graphene-based cellular monoliths[J].Nature Communications,2012,3:1241
[21]LIU W,CHEN Z,ZHOU G M,et al.3D porous spongeinspired electrode for stretchable lithium-ion batteries[J].Advanced Materials,2016,28(18):3578-358
[22]ZHAI D,ZHANG T,GUO J,et al.Water-based ultraviolet curable conductive inkjet ink containing silver nanocolloids for flexible electronics[J].Colloids and Surfaces:A-Physicochemical and Engineering Aspects,2013,424(17):1-9
[23]YAO H B,GE J,WANG C F,et al.A flexible and highly pressure-sensitive graphene-polyurethane sponge based on fractured microstructure design[J].Advanced Materials,2013,25(46):6692-6698
[2]LEVI A,PIOVANELLI M,FURLAN S,et al.Transparent,electronic skin for distributed and multiple pressure sensing[J].Sensors,2013,13(5):6578-6604
[3]KIM D H,KIM Y S,WU J,et al.Ultrathin silicon circuits with strain-isolation layers and mesh layouts for highperformance electronics on fabric,vinyl,leather,and paper[J].Advanced Materials,2009,21(36):3703-3707
[4]FRUTIGER A,MUTH J T,VOGT D M,et al.Capacitive soft strain sensors via multicore-shell fiber printing[J].Advanced Materials,2015,27(15):2440-2446
[5]YAMADA T,HAYAMIZU Y,YAMAMOTO Y,et al.Astretchable carbon nanotube strain sensor for humanmotion detection[J].Nature Nanotechnology,2011,6(5):296-301
[6]HEMPEL M,NEZICH D,KONG J,et al.A novel class of strain gauges based on layered percolative films of 2Dmaterials[J].Nano Letters,2012,12(11):5714-5718
[7]PARK W T,MALLON J R,RASTEGAR A J,et al.Review:Semiconductor piezoresistance for microsystems[J].Proc IEEE,2009,97(3):513-552
[8]DI C A,ZHANG F,ZHU D.Multi-functional integration of organic field-effect transistors(OFETs):advances and perspectives[J].Advanced Materials,2013,25(3):313-330
[9]SCHWARTZ G,TEE B C,MEI J,et al.Flexible polymer transistors with high pressure sensitivity for application in electronic skin and health monitoring[J].Nature Communications,2013,4(5):1859
[10]MANNSFELD S C B,TEE B C K,STOLTENBERG R M,et al.Highly sensitive flexible pressure sensors with microstructured rubber dielectric layers[J].Nature Materials,2010,9(10):859-864
[11]SOMEYA T,SEKITANI T,IBA S,et al.A large-area,flexible pressure sensor matrix with organic field-effect transistors for artificial skin applications[J].Proceedings of the National Academy of Sciences of the United States of America,2004,101(27):9966-9970
[12]TAKEI K,TAKAHASHI T,HO J C,et al.Nanowire active-matrix circuitry for low-voltage macroscale artificial skin[J].Nature Materials,2010,9(10):821-826
[13]PANG C,LEE G Y,KIM T I,et al.A flexible and highly sensitive strain-gauge sensor using reversible interlocking of nanofibres[J].Nature Materials,2012,11(9):795-801
[14]FRADEN J.Handbook of modern sensors:physics,design and applications[M].4th ed.New York:Springer,1996:59
[15]KING M G,BARAGWANATH A J,ROSAMOND M C,et al.Porous PDMS force sensitive resistors[J].Procedia Chemistry,2009,1(1):568-571
[16]HAN J W,KIM B,LI J,et al.Flexible,compressible,hydrophobic,floatable,and conductive carbon nanotubepolymer sponge[J].Applied Physics Letters,2013,102(5):051903
[17]LIANG H W,GUAN Q F,ZHU Z,et al.Highly conductive and stretchable conductors fabricated from bacterial cellulose[J].NPG Asia Materials,2012,4:19
[18]YAO H B,HUANG G,CUI C H,et al.Macroscale elastomeric conductors generated from hydrothermally synthesized metal-polymer hybrid nanocable sponges[J].Advanced Materials,2011,23(45):3643-3647
[19]SONG Y,CHEN H T,SU Z M,et al.Highly compressible integrated supercapacitor-piezoresistance-sensor system with CNT-PDMS Sponge for health monitoring[J].Small,2017,13(39):1702091
[20]QIU L,LIU J Z,CHANG S L Y,et al.Biomimetic superelastic graphene-based cellular monoliths[J].Nature Communications,2012,3:1241
[21]LIU W,CHEN Z,ZHOU G M,et al.3D porous spongeinspired electrode for stretchable lithium-ion batteries[J].Advanced Materials,2016,28(18):3578-358
[22]ZHAI D,ZHANG T,GUO J,et al.Water-based ultraviolet curable conductive inkjet ink containing silver nanocolloids for flexible electronics[J].Colloids and Surfaces:A-Physicochemical and Engineering Aspects,2013,424(17):1-9
[23]YAO H B,GE J,WANG C F,et al.A flexible and highly pressure-sensitive graphene-polyurethane sponge based on fractured microstructure design[J].Advanced Materials,2013,25(46):6692-6698